Products

EVOS

NEW!


The EVOS PVD System is the ideal system 

for all your PVD requirements.



- Small footprint allows for efficient utilization

   of expensive fab floor space. 

- Field configurable up to 200mm.

- Very low cost of ownership

- Up to 5 deposition stations or 1 pre-clean etch

   and 4 deposition for process flexibility 

- Fully customization to your specific requirements.

 

 
Email: info@zhengwei-tech.com