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Feature:

¢Measure CD from 0.5u to 50u
¢Measure Overlay from 0.05u to 5.0u
¢Check for specific patterns - ie: wafer ID no. Bar Code etc.
¢Check for bad exposure contrast.
¢Software can be customized to analyze any visual pattern!
¢Fully Automatic - Takes away the need for an operator 
¢Fully Custom software – customer can program the tool
¢Verysmallfootprint- 100cmX75cm